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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Impact, Factor and Metrics, Impact Score, Ranking, h-index, SJR, Rating, Publisher, ISSN, and More

Last Updated on June 27, 2025

Impact Score

2024-2025

1.15

h-Index

2024-2025

 127

Rank

2024-2025

 17333

SJR

2024-2025

 0.28

Note: The impact score or impact index shown here is equivalent to the average number of times documents published in a journal/conference in the past two years have been cited in the current year (i.e., Cites / Doc. (2 years)). It is based on Scopus data and can be a little higher or different compared to the impact factor (IF) produced by Journal Citation Report. Please refer to the Web of Science data source to check the exact journal impact factor ™ (Thomson Reuters) metric.

Important Metrics and Factor

Title Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Abbreviation J. Vac. Sci. Technol. B:Nanotechnol. Microelectron.
Publication Type Journal
Subject Area, Categories, Scope Condensed Matter Physics (Q3); Electrical and Electronic Engineering (Q3); Electronic, Optical and Magnetic Materials (Q3); Instrumentation (Q3); Materials Chemistry (Q3); Process Chemistry and Technology (Q3); Surfaces, Coatings and Films (Q3)
h-index 127
Overall Rank/Ranking 17333
SCImago Journal Rank (SJR) 0.28
Impact Score 1.15
Publisher AVS Science and Technology Society
Country United States
ISSN 21662746, 21662754
Best Quartile Q3
Coverage History 1991-1992, 2009-2025




About Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics


Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is a journal covering the technologies/fields/categories related to Condensed Matter Physics (Q3); Electrical and Electronic Engineering (Q3); Electronic, Optical and Magnetic Materials (Q3); Instrumentation (Q3); Materials Chemistry (Q3); Process Chemistry and Technology (Q3); Surfaces, Coatings and Films (Q3). It is published by AVS Science and Technology Society. The overall rank of Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is 17333. According to SCImago Journal Rank (SJR), this journal is ranked 0.28. SCImago Journal Rank is an indicator, which measures the scientific influence of journals. It considers the number of citations received by a journal and the importance of the journals from where these citations come. SJR acts as an alternative to the Journal Impact Factor (or an average number of citations received in last 2 years). This journal has an h-index of 127. The best quartile for this journal is Q3.

The ISSN of Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics journal is 21662746, 21662754. An International Standard Serial Number (ISSN) is a unique code of 8 digits. It is used for the recognition of journals, newspapers, periodicals, and magazines in all kind of forms, be it print-media or electronic. Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is cited by a total of 655 articles during the last 3 years (Preceding 2024).


Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics Impact IF 2024-2025


The Impact IF 2024 of Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is 1.15, which is computed in 2025 as per its definition. Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics IF is decreased by a factor of 0.25 and approximate percentage change is -17.86% when compared to preceding year 2023, which shows a falling trend. The impact IF, also denoted as Journal impact score (JIS), of an academic journal is a measure of the yearly average number of citations to recent articles published in that journal. It is based on Scopus data.

Table Setting

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics Impact IF 2025 Prediction


Impact IF 2024 of Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is 1.15. If the same downward trend persists, Impact IF may fall in 2025 as well.


Impact IF Trend


Year wise Impact IF of Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. Based on Scopus data.


Year Impact IF
2025/2026 Coming Soon
2024 1.15
2023 1.40
2022 1.51
2021 1.62
2020 1.54
2019 1.69
2018 1.46
2017 1.49
2016 1.75
2015 1.58
2014 1.62

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics h-index


  Table Setting

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics has an h-index of 127. It means 127 articles of this journal have more than 127 number of citations. The h-index is a way of measuring the productivity and citation impact of the publications. The h-index is defined as the maximum value of h such that the given journal/author has published h papers that have each been cited at least h number of times.




Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics ISSN


The ISSN of Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is 21662746, 21662754. ISSN stands for International Standard Serial Number.

An ISSN is a unique code of 8 digits. It is used for the recognition of journals, newspapers, periodicals, and magazines in all kind of forms, be it print-media or electronic.

Table Setting

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics Rank and SCImago Journal Rank (SJR)


The overall rank of Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is 17333. According to SCImago Journal Rank (SJR), this journal is ranked 0.28. SCImago Journal Rank is an indicator, which measures the scientific influence of journals. It considers the number of citations received by a journal and the importance of the journals from where these citations come.

SJR of Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics by Year


Year SJR
2025/2026 Coming Soon
2024 0.28
2023 0.328
2022 0.400
2021 0.420
2020 0.429
2019 0.403
2018 0.465
2017 0.467
2016 0.595
2015 0.533
2014 0.509

Ranking of Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics by Year


Year Ranking
2025/2026 Coming Soon
2024 17333
2023 14892
2022 12480
2021 11644
2020 11451
2019 11694
2018 10100
2017 9736
2016 7927
2015 8727
2014 8834

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics Publisher


Table Setting

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is published by AVS Science and Technology Society. It's publishing house is located in United States. Coverage history of this journal is as following: 1991-1992, 2009-2025. The organization or individual who handles the printing and distribution of printed or digital publications is known as Publisher.


Call For Papers


Visit the official website of the journal/conference to check the further details about the call for papers.


Abbreviation


The IS0 4 standard abbreviation of Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is J. Vac. Sci. Technol. B:Nanotechnol. Microelectron.. This abbreviation ('J. Vac. Sci. Technol. B:Nanotechnol. Microelectron.') is well recommended and approved for the purpose of indexing, abstraction, referencing and citing goals. It meets all the essential criteria of ISO 4 standard.

ISO 4 (International Organization for Standardization 4) is an international standard that defines a uniform and consistent system for abbreviating serial publication titles and journals.


How to publish in Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics


If your research field is/are related to Condensed Matter Physics (Q3); Electrical and Electronic Engineering (Q3); Electronic, Optical and Magnetic Materials (Q3); Instrumentation (Q3); Materials Chemistry (Q3); Process Chemistry and Technology (Q3); Surfaces, Coatings and Films (Q3), then please visit the official website of this journal.


Acceptance Rate


The acceptance rate/percentage of any academic journal/conference depends upon many parameters. Some of the critical parameters are listed below.

  • The demand or interest of researchers/scientists in publishing in a specific Journal/Conference.
  • Peer review complexity and timeline.
  • The mix of unsolicited and invited submissions.
  • The time it takes from manuscript submission to final publication.
  • And Many More.

It is essential to understand that the acceptance rate/rejection rate of papers varies among journals. Some Journals considers all the manuscripts submissions as a basis of acceptance rate computation. On the other hand, few consider the only manuscripts sent for peer review or few even not bother about the accurate maintenance of total submissions. Hence, it can provide a rough estimation only.

The best way to find out the acceptance rate is to reach out to the associated editor or to check the official website of the Journal/Conference.



Frequently Asked Questions (FAQs)


What's the latest impact IF of the Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics?

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics latest impact IF is 1.15. It's evaluated in the year 2024. The highest and the lowest impact IF or impact score of this journal are 1.75 (2016) and 1.15 (2024), respectively, in the last 11 years. Moreover, its average IS is 1.53 in the previous 11 years.


What's the SCImago Journal Rank (SJR) of the Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics?

The Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics has an SJR (SCImago Journal Rank) of 0.28, according to the latest data. It is computed in the year 2025. In the past 11 years, this journal has recorded a range of SJR, with the highest being 0.595 in 2016 and the lowest being 0.28 in 2024. Furthermore, the average SJR of the Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics over the previous 11-year period stands at 1.53.


What's the latest h-index of the Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics?

The latest h-index of the Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is 127.


Who's the publisher of the Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics?

The Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is published by the AVS Science and Technology Society, with its country of publication being the United States.


What's the current ranking of the Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics?

The Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is currently ranked 17333 out of 27955 Journals, Conferences, and Book Series in the latest ranking. Over the course of the last 11 years, this journal has experienced varying rankings, reaching its highest position of 7927 in 2016 and its lowest position of 17333 in 2024.


What's the abbreviation or short name for the Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics?

The standard ISO4 abbreviation for the Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is J. Vac. Sci. Technol. B:Nanotechnol. Microelectron..


Is the "Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics" classified as a Journal, Conference and Proceedings, Trade Journal or Book Series?

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is classified as a journal that the AVS Science and Technology Society publishes.


What's the scope or major areas of the Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics?

The Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics encompasses the following areas:

  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Materials Chemistry
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films

For a more comprehensive understanding of its scope, check the official website of this journal.


What's the ISSN of the Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics?

The Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is assigned the following International Standard Serial Numbers (ISSN): 21662746, 21662754.


What's the best quartile of the Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics?

The best quartile for the Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics is Q3 (2024).


What's the coverage history of the Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics?

The Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics coverage history can be summarized as follows: 1991-1992, 2009-2025.


Credits and Sources


  • Scimago Journal & Country Rank (SJR), https://www.scimagojr.com/
  • Journal Impact Factor, https://clarivate.com/



Impact Score, h-Index, and Other Important Details of These Journals, Conferences, and Books


Journal/Conference/Workshop/Book Title Type Ranking Publisher h-index Impact Score
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Year wise Impact Score (IS) of Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Impact Score Table

Year Impact Score (IS)
2025/2026 Coming Soon
2024 1.15
2023 1.40
2022 1.51
2021 1.62
2020 1.54
2019 1.69
2018 1.46
2017 1.49
2016 1.75
2015 1.58
2014 1.62



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